Matdev Lab Dox AET - Oregon State University PDF 1dba2543
Matdev Lab Dox AET - Oregon State University
preThursdayJanuary302003HomeMatdevLabDoxAETRTPAETTHERMALRTASYSTEMOPERATIONMANUALFORANNEALINGOFTHINFILMSByPaulKeirSept261996andrevisedbyJeffBenderJuly42001ReferencePersonsJeffBenderRandyHoffmanDepartmentofElectricalandComputerEngineeringOregonStateUniversity1INTRODUCTIONTheAETTHERMALRXSERIESRapidThermalAnnealingRTAsystemisamoderncomputercontrolledannealingsystemTheRTA
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