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Review of Scientific Instruments
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Volume 81, Issue 3
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10.1063/1.3361265
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Submitted: 16 June 2009
Accepted: 22 February 2010
Published Online: 30 March 2010
An experimental procedure for precise evaluation of electron density distribution of a nanostructured material by coherent x-ray diffraction microscopy
Review of Scientific Instruments 81 , 033707 (2010);
https://doi.org/10.1063/1.3361265
Yukio Takahashi Hideto Kubo Yoshinori Nishino Hayato Furukawa Ryosuke Tsutsumi Kazuto Yamauchi Tetsuya Ishikawa Eiichiro Matsubara
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We developed a coherent x-ray diffraction microscopy (CXDM) system that enables us to precisely evaluate the electron density of an isolated sample. This system enables us to determine the dose per surface unit of x rays illuminated onto an isolated sample by combining incident x-ray intensity monitoring and the CXDM of a reference sample. By using this system, we determined the dose of x rays illuminated onto a nanostructured island fabricated by focused-ion-beam chemical vapor deposition and derived the electron density distribution of such a nanostructured island. A projection image of the nanostructured island with a spatial resolution of 24.1 nm and a contrast resolution higher than 2.3 × 10 7 electrons / pixel was successfully reconstructed.
This research has been carried out at the Frontier Research Base for Global Young Researchers, Osaka University, in the Program of Promotion of Environmental Improvement to Enhance Young Researcher’s Independence, the Special Coordination Funds for Promoting Science and Technology, from the Ministry of Education, Culture, Sports, Science and Technology (MEXT). This work was also partly supported by funds from a grant-in-aid for the “Promotion of X-Ray Free Electron Laser Research,” Specially Promoted Research (Grant No. 18002009), Young Scientists (Grant No. 21686060), the Global COE Program “Center of Excellence for Atomically Controlled Fabrication Technology” from MEXT, Iketani Science and Technology Foundation, and Shimadzu Science Foundation. We acknowledge A. Takeuchi for the technical assistance in FIB-CVD.
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a) Author to whom correspondence should be addressed. Electronic mail: takahashi@wakate.frc.eng.osaka-u.ac.jp .
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